Nitrogen trifluoride is an inorganic compound with the chemical formula NF3. It is a colorless gas at normal temperature and pressure. It is insoluble in water.
It is a strong oxidant and an excellent plasma etching gas in the microelectronics industry. It can also be used as a high-energy fuel.
Nitrogen trifluoride info:
Names | |
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English name
Nitrogen trifluoride
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Other names
Nitrogen fluoride
Trifluoramine Trifluorammonia |
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Identifiers | |
3D model (JSmol)
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ChEBI | |
EC Number |
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1551 | |
PubChem CID
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RTECS number |
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Properties | |
NF3 | |
Molar mass | 71.00 g/mol |
Appearance | colorless gas |
Odor | moldy |
Density | 3.003 kg/m3 (1 atm, 15 °C) 1.885 g/cm3 (liquid at b.p.) |
Melting point | −207.15 °C (−340.87 °F; 66.00 K) |
Boiling point | −129.06 °C (−200.31 °F; 144.09 K) |
0.021 g/100 mL | |
Vapor pressure | 44.0 atm[1](−38.5 °F or −39.2 °C or 234.0 K)[a] |
Refractive index (nD)
|
1.0004 |
Structure | |
trigonal pyramidal | |
0.234 D | |
Thermochemistry | |
Heat capacity (C)
|
53.26 J/(mol·K) |
Std molar
entropy (S⦵298) |
260.3 J/(mol·K) |
Std enthalpy of
formation (ΔfH⦵298) |
−31.4 kcal/mol[2] −109 kJ/mol[3] |
Gibbs free energy (ΔfG⦵)
|
−84.4 kJ/mol |
Nitrogen trifluoride info:
CAS No.: | 232-007-1 |
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Formula: | NF3 |
EINECS: | 232-007-1 |
Constituent: | NF3 |
Grade Standard: | Electronic Grade |
Chemical Property: | Inflammable Gas |
Model NO. | NF3 |
Cylinder | 40L/50kg |
Electron Grade | Electron Grade |
Purity | 99.999% |
Transport Package | Sea Transportation |
Specification | 40L 99.999% |
Origin | China |
Production Capacity | 2000piece/Month |
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